- Condor Sigma Lite XYZTEC shear and pull test machine. Shear tests up to 10 Kgf for glued electronic devices and tensile-compressive tests up to 100 gf. Possibility to improve the machine with additional load cells with rotating system. The machine is with a 40x optical microscope, PC and dedicated software. Acquired - DICA.
- MotionBLITZ EoSens® mini2 camera with high acquisition velocity. In full resolution mode (3 Megapixel) the camera can obtain up to 523 images per second. With partial acquisition it is possible to obtain up to 200000 images per second. Combining the camera with microscopes available at the lab, the camera can be used for the study of MEMS high frequency dynamic responses. To be acquired. MEC
- 3D printing machine with mean resolution (DWS System) for stereolitography – axis z resolution : 10-100 micron, laser spot dimensions : 22 micron, or 3D bio-scaffolder. Acquired, DCMIC
- High precision ink-jet functional fluid printer. Among possible fluids to be used: suspensions of metallic nano-particles and organic materials. Possibility to print on various surfaces as plastic, metals, silicon, paper. The system includes the Dimatix DMP-2800 printer, the DMC-11610 cartridge and the software. To be acquired, DCMIC
- Experimental station for inertial MEMS and for navigation microsystems. Possibility to generate rotations, magnetic fields, vibrations, accelerations at high frequency (Belotti e Bruell&Kjaer). The experimental set up is mounted on an isolated anti-vibration table and is supplemented with a reference inertial unit and measurement instrumentation which covers a wide range of frequencies up to 50 MHz (included a Zurich Instrument Lock-in Amplifier). Acquisitions in progress, DEIB.
Experimental facilities of the Departments involved, available to the MESM&3D lab
|
Department |
Facility |
Experimental activity |
|
DICA |
Probe system with microscope unit. SUSS PM5. SUSS Microtec Test System GmbH. |
Facilities for static and dynamic tests on MEMS closed and on open wafer.
|
|
DICA |
Digital capacimeter. Agilent E4980A Precision LCR Meter. Agilent Technologies Inc. |
|
|
DICA |
|
|
|
DICA |
Low noise current
|
|
|
DICA |
Arbitrary waveform generator. Agilent 33522A. Agilent Technologies Inc. |
|
|
DICA |
System DC Power Supply. Agilent 6614C. Agilent Technologies Inc. |
|
|
|
|
|
|
DEIB |
Rate Table. AC1120S v1.0. ACUTRONIC Switzerland Ltd |
Facilities for static and dynamic tests on MEMS closed and on open wafer.
System for the control and measurement of mechanical stiffness reduction to be used in fatigue tests.
Possibility to control the pressure.
Possibility to perform tests on magnetometers with a magnetic field generator.
|
|
DEIB |
Lock-in Amplifier. SR830 DSP. Stanford Research Systems, Inc. |
|
|
DEIB |
Metallographic Optical Microscope. Axiotron. Carl Zeiss Inc. |
|
|
DEIB |
Probe system with microscope unit. SUSS PM5. SUSS Microtec Test System GmbH |
|
|
DEIB |
Semiconductor Device Analyzer. Agilent B1500A. Agilent Technologies Inc. |
|
|
DEIB |
Ultra High Vacuum Pump. Pfeiffer TSH 071
|
|
|
DEIB |
Micro Magnetics, Inc. 3- axis Helmholtz coil Magnetic Field Controller (up to 5 mT, 6 mT and 7 mT on the X, Y and Z axis) with earth field compensation unit |
|
|
|
|
|
|
DCMIC |
XRF – X-ray Fluorescence. Fischerscope® X-Ray XAN |
Facilities for micro and nano scale characterization.
|
|
DCMIC |
|
|
|
DCMIC |
Scanning Probe Microscopy. SOLVER PRO-M |
|
|
DCMIC |
Dip Pen Nanolithography System - NanoInk |
|
|
DCMIC |
5 x Desktop 3D Printers Fusion Deposition Modeling |
|
|
DCMIC |
Plasma Reactor – Kenosistec 20X30 |
|
|
DCMIC |
UV photopolymerization equipment |
|
|
|
|
|
|
MEC |
1x Electrodynamic shaker DM/PD.005 Unholtz Dickie |
Facilities for dynamic tests and for the analysis of movements in open MEMS.
|
|
MEC |
20 Laser distance sensors M5L/10, M5L/20, M5L/200, M5L/400, M7L/20 MEL Mikroelektronik GmbH |
|
|
MEC |
5 x Servoaccelerometer Q-Flex QA-700 Honeywell |
|
|
MEC |
6 x Seismic, High Sensitivity, Piezoaccelerometer 393B12 PCB Piezotronics |
|
|
MEC |
12 x Monoaxial Piezoaccelerometer 4508-01 Brüel & Kjaer |
|
|
MEC |
6 x Triaxial Piezoaccelerometer 356A02 PCB Piezotronics |
|
|
MEC |
General purpose Modal Analysis impact hammer 086C03 PCB Piezotronics |
|
|
MEC |
Modally Tuned® Impulse Hammer w/force sensor and tips 086D05 PCB Piezotronics |
|
|
MEC |
LaserDoppler VH300 Ometron |
|
|
MEC |
Linear Motor and Control Unit 1FN1 186 – 5AC71 – 0AA0 (motor) Sinumerik 840 D – Simodrive 611 D (control) - Siemens |
|
|
MEC |
Laser Doppler 2D scanning vibrometer Polytec PSV400+OFV5000 VD04 BPS |
|
|
MEC |
Thermo-vacuum chamber Varian Vacuum rotary pump. |